Saint-Gobain Ceramic Materials  is the leading supplier of solid planar diffusion sources to the semiconductor industry.

 

Our PDS® Planar Diffusion Sources offer a superior dopant system for safe, cost-effective, reliable doping of silicon wafers. Our PDS Products allow semiconductor fabricators to replace hazardous chemical dopants such as boron trichloride, boron tribromide, diborane, phosphorus oxychloride, and phosphine.