PDS® Planar Diffusion Sources
Solid Source Doping Applications
Saint-Gobain Advanced Ceramics Corp. is the leading supplier of solid planar diffusion sources to the semiconductor industry. Our PDS® Planar Diffusion Sources offer a superior dopant system for safe, cost-effective, reliable doping of silicon wafers. Our PDS Products allow semiconductor fabricators to replace hazardous chemical dopants such as boron trichloride, boron tribromide, diborane, phosphorus oxychloride, and phosphine.
»Select from the related link at right for more information on PDS® Products.