Boron Nitride Products
PDS® Products
PDS® Planar Diffusion Sources

N-Type Phosphorus PDS® Product Sources

PDS N-Type

PDS® N-Type Phosphorus Product Sources

 

Saint-Gobain Advanced Ceramics is the leading supplier of solid planar diffusion sources to the semiconductor industry. PDS® Phosphorus N-Type Product sources are used for doping silicon wafers.
 
Phosphorus solid N-Type PDS Product source materials incorporate a unique manufacturing technology, combining phosphorus dopant material and an inert silicon carbide substrate. The resulting sources offer superior doping characteristics across a wide temperature range.  

 


PDS® Products Phosphorus N-Type Product Applications

 Analog Power Transistor
 Diode Mixed Signal
 Optoelectronics Rectifier
 Thyristor Other

 

 

N-Type PDS® Product Advantages

  • Superior sheet resistance uniformity - particularly on large diameter silicon, higher yields
  • Excellent control of doping parameters 
  • Safest sources available - eliminate hazards of gas and liquid systems
  • Reduced maintenance - dopant glass transfers directly to the silicon, virtually no downtime for maintenance
  • Increased load capacity - higher throughput, up to 150 silicon wafers per run
  • Cost-effective - no additional expense to convert existing gas equipment, lower total processing costs